Inductively Coupled Plasma-Mass Spectrometry (ICPMS) is a technique for detecting metal impurity content (except for hard-to-ionize elements such as F and O, almost all elements in the periodic table can be detected)

Principle: The liquid sample is introduced into the atomization chamber for atomization through the siphon action of the atomizer, and ionized into monovalent positive ions on the plasma flame. Target ions are screened by a quadrupole with the different mass-to-charge ratio of elements, and arrive at an EM detector for detection.

Chemicals：

Detecting elements：

Limit of detection：

Ion Chromatography is a method for separating different anions or cations by using the different retention capacities for different ions in a stationary phase.

Principle: The sample is introduced into the chromatographic column using an autosampler, different ions in the sample are separated by the chromatographic column while being flushed in eluent, and then the detector collects conductivity signals after the ions enter, compares the signals with the standard curve and calculates the concentration of different ions.

Ion-exchange chromatography is mainly used for the analysis of inorganic and organic anions and cations. In Fab, it is mainly used for the monitoring of  UPW/environmental AMC

Main ions detected in IC

Anions：F^-,Cl^-,Br^-,NO₂^-,NO₃^-,SO₄^2-,PO₄^3-                

Cation：NH₄^⁺                

Limit of detection：

＜1ppb

The potentiometric titrator is a titration instrument based on the principles of acid-base neutralization, reduction-oxidation and complexation reactions, which determines the end point of the titration by measuring the electric potential change

In the semiconductor industry, it is used for constant concentration detection of Incoming, FAC and WET Process Chemical

Chemicals:

Acids:HNO₃，H₂SO₄，HCl，SC₁，SC₂，M₁，M₂ etc.

Bases:NH₄OH，TMAH etc.

Oxidizability:H₂O₂ etc.

Test range:

0.1~100%

Karl Fischer (KF) titration is a universally recognized classic method for determining water content in all types of substances, and is widely used in chemical, oil, pharmaceutical and food fields.

Reaction principle：

I. CH₃OH + SO₂ + RN → [RNH]SO₃CH₃

II.H₂O + I₂ +  [RNH]SO₃CH₃ + 2RN → [RNH]SO₄CH₃ + 2[RNH]I

(RN =organic base)

During the reaction, the molar ratio of iodine to water consumed is 1:1, and the water content of the sample can be calculated by determining the amount of iodine consumed in the reaction

In the semiconductor industry, it is mainly used for detecting trace water in organic chemicals

Chemicals：

Organic：IPA, acetone etc.

Test range：

0.001-1% (10 µg – 200 mg absolute water)